TY  - BOOK
AU  - Licznerski, Benedykt, ed.
TI  - Metal/Nonmetal Microsystems: Physics, Technology, and Applications
T2  - Proceedings of SPIE; V. 2780
SN  - 9780819421661 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2780
ER  -