Licznerski, Benedykt, ed. <br/><br/>
Metal/Nonmetal Microsystems: Physics, Technology, and Applications  [eBook] 

 - Washington, USA  SPIE  1996 
 - Online resource 
 - Proceedings of SPIE; V. 2780 .
<br/><br/><label>ISBN: </label>9780819421661 (Print)