@book{28131,
	author = {Licznerski, Benedykt, ed.},
	title = {Metal/Nonmetal Microsystems: Physics, Technology, and Applications},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2780},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2780}
}