00781nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002700092245010500119260003200224300002000256490003300276856010300309942000700412999001700419952016300436IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447401 (Print)  cIIA Library  aCourtois, Bernard, ed. 0aMEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assemblyh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 4945  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4945yClick Here to Access eBook  cEB  c28128d28128  00104070aBANbBANd2011-07-01eSPIEhV. 4945l0pEB7588r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4945w2021-11-05yEB