TY  - BOOK
AU  - Courtois, Bernard, ed.
TI  - MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly
T2  - Proceedings of SPIE; V. 4945
SN  - 9780819447401 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4945
ER  -