Courtois, Bernard, ed. <br/><br/>
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly  [eBook] 

 - Washington, USA  SPIE  2003 
 - Online resource 
 - Proceedings of SPIE; V. 4945 .
<br/><br/><label>ISBN: </label>9780819447401 (Print)