@book{28128,
	author = {Courtois, Bernard, ed.},
	title = {MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 4945},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4945}
}