00733nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002600092245005800118260003200176300002000208490003300228856010300261942000700364999001700371952016300388IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819470119 (Print)  cIIA Library  aChiao, Jung-Chih, ed. 0aMEMS/MOEMS Technologies and Applications IIIh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6836  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6836yClick Here to Access eBook  cEB  c28127d28127  00104070aBANbBANd2011-07-01eSPIEhV. 6836l0pEB7587r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6836w2021-11-05yEB