TY  - BOOK
AU  - Jin, Guofan, ed.
TI  - MEMS/MOEMS Technologies and Applications
T2  - Proceedings of SPIE; V. 4928
SN  - 9780819447173 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4928
ER  -