TY  - BOOK
AU  - Olivier, Scot, ed.
TI  - MEMS/MOEMS Components and Their Applications III
T2  - Proceedings of SPIE; V. 6113
SN  - 9780819461551 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6113
ER  -