@book{28122,
	author = {Olivier, Scot, ed.},
	title = {MEMS/MOEMS Components and Their Applications III},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6113},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6113}
}