TY  - BOOK
AU  - Henning, Albert, ed.
TI  - MEMS/MOEMS Components and Their Applications II
T2  - Proceedings of SPIE; V. 5717
SN  - 9780819456915 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5717
ER  -