TY  - BOOK
AU  - Janson, Siegfried, ed.
TI  - MEMS/MOEMS Components and Their Applications
T2  - Proceedings of SPIE; V. 5344
SN  - 9780819452528 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5344
ER  -