00492nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245004500113260003200158300002000190490003300210856010300243IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819453785 (Print)  cIIA Library  aUrey, Hakan, ed. 0aMEMS, MOEMS, and Micromachiningh[eBook]  aWashington, USAbSPIEc2004  aOnline resource  aProceedings of SPIE; V. 5455  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5455yClick Here to Access eBook