TY  - BOOK
AU  - Janson, Siegfried, ed.
TI  - MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
T2  - Proceedings of SPIE; V. 4981
SN  - 9780819447814 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4981
ER  -