00558nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245010500119260003200224300002000256490003300276856010300309IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447814 (Print)  cIIA Library  aJanson, Siegfried, ed. 0aMEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication IIh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 4981  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4981yClick Here to Access eBook