Janson, Siegfried, ed. <br/><br/>
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II  [eBook] 

 - Washington, USA  SPIE  2003 
 - Online resource 
 - Proceedings of SPIE; V. 4981 .
<br/><br/><label>ISBN: </label>9780819447814 (Print)