@book{28113,
	author = {Janson, Siegfried, ed.},
	title = {MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 4981},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4981}
}