00526nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245007300119260003200192300002000224490003300244856010300277IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819438317 (Print)  cIIA Library  aVladimirsky, Yuli, ed. 0aMaterials and Device Characterization in Micromachining IIIh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  aProceedings of SPIE; V. 4175  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4175yClick Here to Access eBook