Vladimirsky, Yuli, ed. <br/><br/>
Materials and Device Characterization in Micromachining III  [eBook] 

 - Washington, USA  SPIE  2000 
 - Online resource 
 - Proceedings of SPIE; V. 4175 .
<br/><br/><label>ISBN: </label>9780819438317 (Print)