@book{27760,
	author = {Vladimirsky, Yuli, ed.},
	title = {Materials and Device Characterization in Micromachining III},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4175},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4175}
}