@book{27758,
	author = {Friedrich, Craig, ed.},
	title = {Materials and Device Characterization in Micromachining},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3512},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3512}
}