TY  - BOOK
AU  - Sabnis, Anant, ed.
TI  - Manufacturing Process Control for Microelectronic Devices and Circuits
T2  - Proceedings of SPIE; V. 2336
SN  - 9780819416698 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2336
ER  -