@book{27751,
	author = {Sabnis, Anant, ed.},
	title = {Manufacturing Process Control for Microelectronic Devices and Circuits},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 2336},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2336}
}