@book{27689,
	author = {Mack, Chris, ed.},
	title = {Lithography for Semiconductor Manufacturing II},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4404},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4404}
}