00504nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245005700113260003200170300002000202490003300222856010300255IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819432216 (Print)  cIIA Library  aMack, Chris, ed. 0aLithography for Semiconductor Manufacturingh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3741  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3741yClick Here to Access eBook