TY  - BOOK
AU  - Kley, Ernst-Bernhard, ed.
TI  - Lithographic and Micromachining Techniques for Optical Component Fabrication II
T2  - Proceedings of SPIE; V. 5183
SN  - 9780819450562 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5183
ER  -