00549nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245009300122260003200215300002000247490003300267856010300300IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819450562 (Print)  cIIA Library  aKley, Ernst-Bernhard, ed. 0aLithographic and Micromachining Techniques for Optical Component Fabrication IIh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5183  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5183yClick Here to Access eBook