Kley, Ernst-Bernhard, ed. <br/><br/>
Lithographic and Micromachining Techniques for Optical Component Fabrication II  [eBook] 

 - Washington, USA  SPIE  2003 
 - Online resource 
 - Proceedings of SPIE; V. 5183 .
<br/><br/><label>ISBN: </label>9780819450562 (Print)