00546nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245009000122260003200212300002000244490003300264856010300297IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819441546 (Print)  cIIA Library  aKley, Ernst-Bernhard, ed. 0aLithographic and Micromachining Techniques for Optical Component Fabricationh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4440  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4440yClick Here to Access eBook