@book{27684,
	author = {Kley, Ernst-Bernhard, ed.},
	title = {Lithographic and Micromachining Techniques for Optical Component Fabrication},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4440},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4440}
}