TY  - BOOK
AU  - Batchelder, John, ed.
TI  - Lasers in Microlithography
T2  - Proceedings of SPIE; V. 0774
SN  - 9780892528097 (Print)
PY  - 1987///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0774
ER  -