@book{27494,
	author = {Batchelder, John, ed.},
	title = {Lasers in Microlithography},
	publisher = {SPIE},
	year = {1987},
	series = {Proceedings of SPIE; V. 0774},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0774}
}