@book{27493,
	author = {Braren, Bodil, ed.},
	title = {Lasers in Microelectronic Manufacturing},
	publisher = {SPIE},
	year = {1991},
	series = {Proceedings of SPIE; V. 1598},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1598}
}