@book{27402,
	author = {Pfleging, Wilhelm, ed.},
	title = {Laser-based Micro- and Nanopackaging and Assembly V},
	publisher = {SPIE},
	year = {2011},
	series = {Proceedings of SPIE; V. 7921},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7921}
}