00519nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245006600119260003200185300002000217490003300237856010300270IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819479815 (Print)  cIIA Library  aPfleging, Wilhelm, ed. 0aLaser-based Micro- and Nanopackaging and Assembly IVh[eBook]  aWashington, USAbSPIEc2010  aOnline resource  aProceedings of SPIE; V. 7585  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7585yClick Here to Access eBook