@book{27401,
	author = {Pfleging, Wilhelm, ed.},
	title = {Laser-based Micro- and Nanopackaging and Assembly IV},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7585},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7585}
}