TY  - BOOK
AU  - Pfleging, Wilhelm, ed.
TI  - Laser-based Micro- and Nanopackaging and Assembly III
T2  - Proceedings of SPIE; V. 7202
SN  - 9780819474483 (Print)
PY  - 2009///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7202
ER  -