TY  - BOOK
AU  - Veiko, Vadim, ed.
TI  - Laser-Assisted Microtechnology 2000
T2  - Proceedings of SPIE; V. 4157
SN  - 9780819438133 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4157
ER  -