00497nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245004900114260003200163300002000195490003300215856010300248IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819438133 (Print)  cIIA Library  aVeiko, Vadim, ed. 0aLaser-Assisted Microtechnology 2000h[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4157  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4157yClick Here to Access eBook