@book{27396,
	author = {Veiko, Vadim, ed.},
	title = {Laser-Assisted Microtechnology 2000},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4157},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4157}
}