TY  - BOOK
AU  - Veiko, Vadim, ed.
TI  - Laser-Assisted Micro- and Nanotechnologies 2003
T2  - Proceedings of SPIE; V. 5399
SN  - 9780819453228 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5399
ER  -