@book{27395,
	author = {Veiko, Vadim, ed.},
	title = {Laser-Assisted Micro- and Nanotechnologies 2003},
	publisher = {SPIE},
	year = {2004  },
	series = {Proceedings of SPIE; V. 5399},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5399}
}