TY  - BOOK
AU  - Tang, Charles, ed.
TI  - Laser Processing of Semiconductor Devices
T2  - Proceedings of SPIE; V. 0385
SN  - 9780892524204 (Print)
PY  - 1983///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0385
ER  -