00526nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245007200120260003200192300002000224490003300244856010300277IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447364 (Print)  cIIA Library  aOstendorf, Andreas, ed. 0aLaser Micromachining for Optoelectronic Device Fabricationh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 4941  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4941yClick Here to Access eBook