@book{27206,
	author = {Ostendorf, Andreas, ed.},
	title = {Laser Micromachining for Optoelectronic Device Fabrication},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 4941},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4941}
}