@book{27202,
	author = {Beyer, Eckhard, ed.},
	title = {Laser Materials Processing: Industrial and Microelectronics Applications},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 2207},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2207}
}