Dubowski, Jan, ed. <br/><br/>
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV  [eBook] 

 - Washington, USA  SPIE  1999 
 - Online resource 
 - Proceedings of SPIE; V. 3618 .
<br/><br/><label>ISBN: </label>9780819430885 (Print)