TY  - BOOK
AU  - Dubowski, Jan, ed.
TI  - Laser Applications in Microelectronic and Optoelectronic Manufacturing III
T2  - Proceedings of SPIE; V. 3274
SN  - 9780819427137 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3274
ER  -