Dubowski, Jan, ed. <br/><br/>
Laser Applications in Microelectronic and Optoelectronic Manufacturing III  [eBook] 

 - Washington, USA  SPIE  1998 
 - Online resource 
 - Proceedings of SPIE; V. 3274 .
<br/><br/><label>ISBN: </label>9780819427137 (Print)